• Surface cleanliness validation during production by operators
• Advanced particle analysis for R&D environments
• Quick validation and statistical process control (SPC) monitoring
• Contamination assessment on various products and assemblies including hard-to-reach surfaces
• Particle deposition rate level (PDRL) measurements for cleanroom and vacuum chamber monitoring
• Post-contamination analysis using SEM-EDX workflows

The Fastmicro Sample Scanner enables surface particle contamination measurements using compatible samplers (PMC 2.0 or Fastmicro Sampler). The system delivers high-throughput measurements with operator workflow completed in less than one minute, including on-the-spot processing. The scanner features multiple measurement interfaces, including a 2-inch Wafer Interface for fallout measurements and direct measurement capability with SEMI-standard 2-inch silicon wafers.

Measurement capabilities include analysis of particle quantity, position, and size with annotated image overlays and particle detection visualization. The system provides 3D signal representation of particles and detailed raw image views. Data output includes export functions with KLARF and CSV file formats, with data exchange via USB or ethernet connection. Remote access features are included as standard.

The scanner employs non-destructive measurement technology with no added contamination from the measurement process. Its adaptability across different interfaces makes it suitable for various applications and industries. The system operates within clean environments (ISO 7 or cleaner per ISO 14644-1) and includes optional qualification report generation in UI and PDF format according to ISO 14644-9.

The Fastmicro Sample Scanner supports multiple measurement interfaces and sampling configurations to accommodate different application requirements. Standard configurations include PMC 2.0 samplers, with additional interface options available including the 2-inch Wafer Interface for PDRL measurements and SEMI-standard 2-inch silicon wafer capability. Software customization options enable multi-recipe selection for operator flexibility. Advanced features including custom output criteria configuration and logo addition can be implemented through Advanced Workflow & Reporting software upgrades (pricing varies based on specific requirements).

No flight heritage information provided in source materials.

The Fastmicro Sample Scanner is engineered with precision optical components and advanced digital particle detection systems. The system is packaged in IPCC certified plywood palletboxes for transport and deployment. Scanner specifications include dimensions of 615 x 300 x 460 mm with net weight of 16 kg. All units undergo CE certification and comply with EMC industrial standards. The scanner includes keyboard, mouse, power cord, HDMI cable, and 2x PMC 2.0 samplers as standard inclusions.

The Fastmicro Sample Scanner meets NIST certification standards for detection limits of 0.5 µm PSL equivalent particles and sizing accuracy within 20% for PSL equivalent particles. The system demonstrates reproducibility with relative count variant smaller than 10%, with GR&R reports available upon request. All units are CE certified and comply with EMC industrial norms. Optional qualification reports can be generated in UI and PDF format according to ISO 14644-9. The scanner is specifically designed for operation in clean environments conforming to ISO 7 (ISO 14644-1) or FED STD 209E class 10,000 and cleaner specifications.